MRO Magazine

Tokyo Electron Introduces CLEAN TRACKTM LITHIUS Pro™ AP, High Reliability and Productivity Coater Developer for Advanced Packaging and Other Applications


July 13, 2015
By Business Wire News

TOKYO

Tokyo Electron Limited (TELTM) (TOKYO:8035) today announced the release of the CLEAN TRACKTM LITHIUS Pro™ AP, beginning in the spring of 2016. The new platform features high reliability and productivity for advanced packaging and other applications.

The CLEAN TRACK LITHIUS Pro AP incorporates fundamental concepts from the widely-installed CLEAN TRACK ACTTM 12, which was released in 1999. Our focus was to provide optimized hardware and processes to support advanced packaging, high viscosity and spin-on hard mask applications. Additionally, this platform integrates the latest hardware innovations, such as a new transfer system with alignment capability and compact spin modules from our leading edge CLEAN TRACK LITHIUS Pro Z to improve productivity, reliability and yield.

“Our latest platform inherits key innovations from our CLEAN TRACK series and applies those innovations to advanced packaging and other key semiconductor operations,” commented Steven Yoh, General Manager of TEL’s CTBU.

Tokyo Electron strives to provide innovative and effective technological solutions to exceed our customers’ and the industry’s needs.

About TEL

Tokyo Electron Limited (TEL), established in 1963, is a leading supplier of innovative semiconductor and flat panel display (FPD) production equipment worldwide. All of TEL’s semiconductor and FPD production equipment product lines maintain high market shares in their respective global segments. TEL has strategically located research & development, manufacturing, sales, and service locations all over the world. http://www.tel.com

Tokyo Electron Ltd.
Michelle Pesez, 514-424-1757
michelle.pesez@us.tel.com