MRO Magazine

Rudolph Receives JetStep Lithography System Order from Leading OSAT for Copper Pillar Bump and Fan-Out Wafer Level Packaging Applications

July 8, 2015
By Business Wire News


Rudolph Technologies, Inc. (NYSE: RTEC) announced today that a leading Taiwan-based outsourced assembly and test (OSAT) manufacturer has selected the JetStep® W2300 Advanced Packaging Lithography System for the development of next-generation advanced packaging technology. The system will be used to enhance the wafer-level chip scale packaging (WLSCP) manufacturing process for both flip chip copper (Cu) pillar and fan-out wafer level packaging (FOWLP). Enhanced performance of these processes will help to further advance system-in-package (SiP) processes. The system is expected to ship in the third quarter and joins an extensive array of inspection and metrology systems to enhance Rudolph’s footprint in the customers’ advanced packaging facility.

“Achieving high-yield lithography for plating processes, such as copper pillar bumping and fan-out wafer level packaging, presents many challenges for manufacturers,” stated Rich Rogoff, vice president and general manager of Rudolph’s Lithography Systems Group. “They have been forced to purchase lithography tools customized for each process. The JetStep System has been demonstrated to achieve superior performance in both Cu pillar and FOWLP applications, allowing our customers to maintain a flexible factory by utilizing a single lithography solution that is able to produce a multitude of products in a highly cost-competitive manner.

“This commitment from yet another leading OSAT is further validation of the value of the JetStep System to accelerate advance packaging solutions,” added Rogoff. “The superior applications performance coupled with unique wafer handling capabilities provides our customers with the best cost-of-ownership for advanced packaging lithography.”

Mike Plisinski, Rudolph’s executive vice president and chief operating officer, added, “We are very pleased with the customer response to the JetStep System. This order represents the third installation for the FOWLP process and the second installation for the Cu pillar process. This demonstrates a solid expansion of our customer base as well as growth in our application space over the last 12 months.”

The JetStep Advanced Packaging Lithography product family has been specifically designed to provide solutions to address the challenges of newly-developed processes emerging in advanced packaging manufacturing. The JetStep W Series is intended for use with wafers or other round substrates. The JetStep S Series is for square or rectangular substrates. Both systems feature a 2X reduction stepper with a large field of view (52mm x 66mm) to improve exposure efficiency and throughput. The systems are unique in their ability to handle the wide range of substrates and to accommodate substrate warp, challenges that frequently encountered in the advanced packaging manufacturing processes. These and other purpose-designed features, such as on-the-fly auto focus and large automatic magnification compensation range, provide solutions that increase throughput and maximize yield in advanced package applications that are unavailable from legacy lithography tools initially designed for front-end, wafer-based processes. Further, when Rudolph’s lithography is seamlessly integrated with our inspection, metrology, FDC and YMS software, Rudolph delivers comprehensive solutions that can be matched by no other supplier to accelerate advanced packaging.

For more information about Rudolph’s JetStep systems, please visit, or stop by the Rudolph booth #5580 during SEMICON® West, taking place July 14-16, 2015.

About Rudolph Technologies
Rudolph Technologies, Inc. is a leader in the design, development, manufacture and support of defect inspection, lithography, process control metrology, and data analysis systems and software used by semiconductor and advanced packaging device manufacturers worldwide. Rudolph delivers comprehensive solutions throughout the fab with its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down costs and time to market of their devices. The Company’s expanding portfolio of equipment and software provides comprehensive solutions for front-end wafer processing, final manufacturing and advanced packaging of ICs. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the Company’s website at

Safe Harbor Statement
This press release contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995 (the “Act”) which include the benefits to customers of Rudolph’s products, Rudolph’s business momentum and future growth, Rudolph’s existing market position and its ability to maintain and advance such position relative to its competitors and Rudolph’s ability to meet the expectations and needs of our customers as well as other matters that are not purely historical data. Rudolph wishes to take advantage of the “safe harbor” provided for by the Act and cautions that actual results may differ materially from those projected as a result of various factors, including risks and uncertainties, many of which are beyond Rudolph’s control. Such factors include, but are not limited to, delays in shipping products for technical performance, component supply or other reasons, the company’s ability to leverage its resources to improve its positions in its core markets and fluctuations in customer capital spending. Additional information and considerations regarding the risks faced by Rudolph are available in Rudolph’s Form 10-K report for the year ended December 31, 2014 and other filings with the Securities and Exchange Commission. As the forward-looking statements are based on Rudolph’s current expectations, the company cannot guarantee any related future results, levels of activity, performance or achievements. Rudolph does not assume any obligation to update the forward-looking information contained in this press release.

Rudolph Technologies, Inc.
Steven R. Roth, 973-448-4302
Guerrant Associates
Laura Guerrant-Oiye, 808-882-1467
Trade Press:
Amy Shay, 952-259-1794