Research and Markets: Metrology, Inspection, and Process Control in VLSI Manufacturing Market Study
September 1, 2015 | By Business Wire News
DUBLIN
Research and Markets (http://www.researchandmarkets.com/research/gnjs2q/metrology) has announced the addition of the “Metrology, Inspection, and Process Control in VLSI Manufacturing” report to their offering.
The increase in complexity of semiconductors and the resulting increase in the complexity and cost of the semiconductor manufacturing process has been a driver of demand for metrology and inspection systems.
This report offers a complete analysis of the Process Control market, segmented as: Lithography Metrology; Wafer Inspection/Defect Review; Thin Film Metrology; and Other Process Control Systems. Each of these sectors is further segmented. Market shares of competitors for all segment is presented.
Key Topics Covered:
Chapter 1 Introduction
Chapter 2 Executive Summary
Chapter 3 Metrology/Inspection Technologies
3.1 Introduction
3.2 Imaging Techniques
3.3 Scanning Probe Microscopes
3.4 Optical Techniques
3.5 Film Thickness And Roughness
Chapter 4 Defect Review/Wafer Inspection
4.1 Introduction
4.2 Defect Review
4.3 Patterned Wafer Inspection
4.4 Unpatterned Wafer Inspection
4.5 Macro-Defect Inspection
Chapter 5 Thin Film Metrology
5.1 Introduction
5.2 Metal Thin-Film Metrology
5.3 Non-Metal Thin-Film Metrology
5.4 Substrate/Other Thin Film Metrology
Chapter 6 Lithography Metrology
6.1 Overlay
6.2 CD
6.3 Mask (Reticle) Metrology/Inspection
Chapter 7 Market Forecast
7.1 Introduction
7.2 Market Forecast Assumptions
7.3 Market Forecast
Chapter 8 Integrated/In-Situ Metrology/Inspection Trends
8.1 Introduction
8.2 In-Situ Metrology
8.3 Integrated Metrology
Chapter 9 Key Drivers
9.1 3D
9.2 Back End Metrology Inspection
9.3 300mm/450mm Wafers
9.4 Copper Metrology
9.5 Low-K Dielectrics
9.6 Chemical Mechanical Planarization (CMP)
9.7 Ion Implant
For more information visit http://www.researchandmarkets.com/research/gnjs2q/metrology
View source version on businesswire.com: http://www.businesswire.com/news/home/20150901006351/en/
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